This is an on the fly and non contact inspection system with sorter units.


  • On the fly. Multi optical systems for different purposes.
  • High efficiency computing system be able to do parallel computing.
  • Defects classification
  • Geometry inspection
  • Surface inspection
  • Crack, Chip, V-crack inspection
  • Saw mark inspection
  • Thickness measurement
  • Micro Crack Inspection
  • Life-Time & Resistivity measurement



  • Throughput:3000 wafer/hour
  • Inspection Item size:6" (156 x 156 mm) solar wafer
  • Wafer Type:Mono Crystalline/ Multi Crystalline