Optical Ability

  • From visible to invisible inspection
  • Light Source: Halogen, LED, X-ray
  • Line scan camera, Area camera, Laser

Mechanical Ability

  • Linear motor
  • Optical scale:0.5~1um
  • In line & off line platform

3D Inspection

  • Phase Shifting Method System
  • Laser Triangulation System
  • Z-axis resolution: 0.06~0.1um

Pattern Inspection

  • In house software library with self-developed core algorithm
  • Multi cameras system with parallel computing
  • High speed pattern match and color comparison